Industry Specifications

■ USA Federal Standard209E（1992 Year）

Grade particle diameter(um)
0.1 0.2 0.3 0.5 5.0
1 35.0 7.50 3.00 1.00 NA
10 350 75.0 30.0 10.0 NA
100 NA 750 300 100 NA
1000 NA NA NA 1000 7.0
10000 NA NA NA 10000 70.3
100000 NA NA NA 100000 700
Unit：/ft3
■ GMP Standard

Grade Dust capacity/square meters Max capacity
≥0.5um ≥5um /M3 /.30min
100 3500 0 5 1
10000 350,000 2,000 100 3
100000 3,500,000 20,000 500 10
300000 10,500,000 61,800 NA 15
SFDA:August 1st,1999

■ Based on ≥0.5um,Compared reference table:

No./M3≥0.5um ISO
14644-1(1999)		 US
209E(1992)		 US
209D(1988)		 EEC
GGMP(1989)		 FRANCE
AFNOR(1981)		 GERMANY
VDI 2083(1990)		 JAPAN
JAOA(1989)
1 – – – – – – –
3.5 2 – – – – 0 2
10.0 – M1 – – – – –
35.3 3 M1.5 1 – – 1 3
100 – M2 – – – – –
353 4 M2.5 10 – – 2 4
1,000 – M3 – – – – –
3,530 5 M3.5 100 A+B 4,000 3 5
10,000 – M4 – – – – –
35,300 6 M4.5 1,000 1,000 – 4 6
100,000 – M5 – – – – –
353,000 7 M5.5 10,000 C 400,000 5 7
1,000,000 – M6 – – – – –
3,530,000 8 M6.5 100,000 D 4,000,000 6 8
10,000,000 – M7 – – – – –
■ Suspended particles Grade in Clean room & clean area (reference table)

Grade(N) >=pc/m3)
0.1um 0.2um 0.3um 0.5um 1um 5um
1 10 2
2 100 24 10 4
3 1000 237 102 35 8
4 10000 2370 1020 352 83
5 100000 23700 10200 3520 832 29
6 1000000 237000 102000 35200 8320 293
7 352000 83200 2930
8 3520000 832000 29300
9 35200000 8320000 293000
GB50073-2001